Structural and electrical properties of rf-sputtered RuO 2 films having different conditions of preparation

Author: Lim W.T.   Cho K.R.   Lee C.H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.348, Iss.1, 1999-07, pp. : 56-62

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Abstract