Annealing effects on the microstructure of sputtered gold layers on oxidized silicon investigated by scanning electron microscopy and scanning probe microscopy

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Philosophical Magazine, Vol. 83, Iss. 9, 2003-03 ,pp. : 1137-1142

Taylor & Francis Ltd

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Refractive index of sputtered silicon oxynitride layers for antireflection coating

By Serenyi M.   Racz M.   Lohner T.  

Vacuum, Vol. 61, Iss. 2, 2001-05 ,pp. : 245-249

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Annealing effects on the structure and mechanical properties of r.f.-sputtered Cr-B hard thin films

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Effect of the hydrogen partial pressure ratio on the properties of c-Si:H films prepared by rf magnetron sputtering

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