Raman spectroscopy analysis of magnetron sputtered RuO 2 thin films

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Elsevier

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Effect of oxygen content and thickness of sputtered RuO x electrodes on the ferroelectric and fatigue properties of sol-gel PZT thin films

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Material characteristics and electrical property of reactively sputtered RuO 2 thin films

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Structural, chemical, and electrical characterisation of reactively sputtered WS x thin films

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