Properties of SiO 2 and Si 3 N 4 layers deposited by MF twin magnetron sputtering using different target materials

By Ruske M.   Brauer G.   Pistner J.   Szczyrbowski J.   Weigert M.  

Thin Solid Films, Vol. 351, Iss. 1, 1999-08 ,pp. : 158-163

Elsevier

Access to resources Recommend Favorite

Growth, characterization and interfacial reaction of magnetron sputtered Pt/CeO2 thin films on Si and Si3N4 substrates

By  

SURFACE AND INTERFACE ANALYSIS, Vol. 47, Iss. 7, 2015-07 ,pp. : 777-784

John Wiley & Sons Inc

Access to resources Recommend Favorite

Mid frequency sputtering with TwinMag ( R)-a survey of recent results

By Brauer G.   Ruske M.   Szczyrbowski J.   Teschner G.   Zmelty A.  

Vacuum, Vol. 51, Iss. 4, 1998-12 ,pp. : 655-659

Elsevier

Access to resources Recommend Favorite

Importance of machining on tribology of lubricated slip-rolling contacts of Si 3 N 4 , SiC, Si 3 N 4 -TiN and ZrO 2

By Effner U.   Woydt M.  

Wear, Vol. 216, Iss. 2, 1998-04 ,pp. : 123-130

Elsevier

Access to resources Recommend Favorite

Microstructural and wear characterization of SiC reinforced Al₂O₃?Ö?TiO₂ plasma coating

By Yilmaz Ramazan  

Industrial Lubrication and Tribology, Vol. 58, Iss. 6, 2006-11 ,pp. : 312-319

Emerald Group Publishing Ltd

Access to resources Recommend Favorite