TwinMag TM II: attempts to improve an excellent sputter tool

Author： Heister U.   Krempel-Hesse J.   Szczyrbowski J.   Teschner G.   Bruch J.   Brauer G.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.351, Iss.1, 1999-08, pp. : 27-31

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