Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

Author: Ayras P.   Rantala J.T.   Levy R.   Descour M.R.   Honkanen S.   Peyghambarian N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.352, Iss.1, 1999-09, pp. : 9-12

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Abstract