Time resolved reflectivity measurements of silicon solid phase epitaxial regrowth

Author: Bauer M.   Oehme M.   Sauter M.   Eifler G.   Kasper E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.364, Iss.1, 2000-03, pp. : 228-232

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract