Investigation of Si/SiGe heterostructure material using non-destructive optical techniques

Author: Coonan B.P.   Griffin N.   Beechinor J.T.   Murtagh M.   Redmond G.   Crean G.M.   Hollander B.   Mantl S.   Bozzo S.   Lazzari J.-L.   Arnaud d'Avitaya F.   Derrien J.   Paul D.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.364, Iss.1, 2000-03, pp. : 75-79

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Abstract