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An optical study of silver particles fabricated by ion implantation in a silicon polymer

By Stepanov A. L.   Khaibullin R. I.   Khaibullin I. B.  

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Observation of an enhanced gettering effect in silicon under germanium molecular ion implantation

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Enhanced thermal stability of TA-based thin diffusion barriers by ion implantation

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Visible photoluminescence from silicon nanocrystals formed in silicon dioxide by ion implantation and thermal processing

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