Observation of an enhanced gettering effect in silicon under germanium molecular ion implantation

Author： David C.   Sundaravel B.   Ravindran T.R.   Nair K.G.M.   Panigrahi B.K.   Lenka H.P.   Joseph B.   Mahapatra D.P.  

Publisher： Springer Publishing Company

ISSN： 0947-8396

Source： Applied Physics A, Vol.88, Iss.2, 2007-08, pp. : 397-400

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