De-excitation mechanisms of Er 3+ in Er-doped hydrogenated amorphous silicon prepared by electron cyclotron resonance plasma enhanced chemical vapor deposition

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Journal of Non-Crystalline Solids, Vol. 332, Iss. 1, 2003-12 ,pp. : 53-59

Elsevier

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Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

By Yoon S.F.   Rusli   Ahn J.   Zhang Q.   Yang C.Y.   Yang H.   Watt F.  

Thin Solid Films, Vol. 340, Iss. 1, 1999-02 ,pp. : 62-67

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Amorphous carbon film deposition using a DC-biased screen-grid in an electron cyclotron resonance plasma

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Growth characterization and properties of diamond-like carbon films by electron cyclotron resonance chemical vapor deposition

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Thin Solid Films, Vol. 392, Iss. 1, 2001-07 ,pp. : 16-21

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Application of electron cyclotron resonance chemical vapour deposition in the preparation of hydrogenated boron-doped SiC films

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