The preparation of nanosized silicon by laser-induced chemical vapour deposition

Author： Zhang H.   Wei A.   Liu S.   Wang W.   Chen D.   Liang L.   Chen K.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.368, Iss.2, 2000-06, pp. : 315-318

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