Enhancement of thermal diffusion of delta-doped Sb in SiGe

Author: Nakagawa K.   Kojima H.   Sugii N.   Yamaguchi S.   Miyao M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 226-229

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