Thermal decomposition pathway of Ge and Si oxides: observation of a distinct difference

Author: Prabhakaran K.   Maeda F.   Watanabe Y.   Ogino T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 289-292

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Abstract