Formation process and material properties of reactive sputtered IrO 2 thin films

Author: Horng R.H.   Wuu D.S.   Wu L.H.   Lee M.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.373, Iss.1, 2000-09, pp. : 231-234

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract