The degradation of TiN films on Cu substrates at high temperature under controlled atmosphere

Author: Lu F.-H.   Feng S.-P.   Chen H.-Y.   Li J.-K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.375, Iss.1, 2000-10, pp. : 123-127

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Abstract