Indium tin oxide films prepared by radio frequency magnetron sputtering method at a low processing temperature

Author： Zhang K.   Zhu F.   Huan C.H.A.   Wee A.T.S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.376, Iss.1, 2000-11, pp. : 255-263

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