Deposition of (Ti, Al)N films by filtered cathodic vacuum arc

Author: Cheng Y.H.   Tay B.K.   Lau S.P.   Shi X.   Chua H.C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.379, Iss.1, 2000-12, pp. : 76-82

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Abstract