

Author: Bernard M. Deneuville A. Thomas O. Gergaud P. Sandstrom P. Birch J.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.380, Iss.1, 2000-12, pp. : 252-255
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content


Thermal stability of TiN/AlN superlattices
By Setoyama M. Irie M. Ohara H. Tsujioka M. Takeda Y. Nomura T. Kitagawa N.
Thin Solid Films, Vol. 341, Iss. 1, 1999-03 ,pp. :




Oxidation behavior of TiN/AlN multilayer films prepared by ion beam-assisted deposition
By Kim D.-G. Seong T.-Y. Baik Y.-J.
Thin Solid Films, Vol. 397, Iss. 1, 2001-10 ,pp. :


TiN/AlN Nano Multilayers Film Fabricated by Plasma Enhanced Atomic Layer Deposition
Materials Science Forum, Vol. 2015, Iss. 817, 2015-05 ,pp. :


Raman chemical imaging of tribological nitride coated (TiN, TiAlN) surfaces
Wear, Vol. 252, Iss. 11, 2002-07 ,pp. :