Raman spectra of TiN/AlN superlattices

Author: Bernard M.   Deneuville A.   Thomas O.   Gergaud P.   Sandstrom P.   Birch J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.380, Iss.1, 2000-12, pp. : 252-255

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Abstract