Ion-beam stimulated solid-phase crystallization of amorphous Si on SiO 2

Author: Miyao M.   Tsunoda I.   Sadoh T.   Kenjo A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 104-106

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Abstract