Ultrathin c-Si films deposited by PECVD

Author： Rizzoli R. Summonte C. Pla J. Centurioni E. Ruani G. Desalvo A. Zignani F.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 7-10

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