Interfacial reaction pathways and kinetics during annealing of epitaxial Al/TiN(001) model diffusion barrier systems

Author： Chun J.-S. Desjardins P. Petrov I. Greene J.E. Lavoie C. Cabral C.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.391, Iss.1, 2001-07, pp. : 69-80

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