Ir deposition by surface combustion of (MeCp)Ir(COD): An experimental simulation of metallorganic chemical vapor deposition

Author: Yan X.-M.   Kim C.   White J.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.391, Iss.1, 2001-07, pp. : 62-68

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Abstract