Effect of deposition parameters on optical and mechanical properties of MF- and DC-sputtered Nb 2 O 5 films

Author： Hunsche B. Vergohl M. Neuhauser H. Klose F. Szyszka B. Matthee T.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.392, Iss.2, 2001-07, pp. : 184-190

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