Room temperature deposition of hydrogenated amorphous carbon films from laser-assisted photolytic chemical vapor deposition at 248 nm

Author： Lindstam M. Boman M. Piglmayer K.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.394, Iss.1, 2001-08, pp. : 114-123

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