Investigations on doping of amorphous and nanocrystalline silicon films deposited by catalytic chemical vapour deposition

Author： Fonrodona M. Soler D. Bertomeu J. Andreu J.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.395, Iss.1, 2001-09, pp. : 125-129

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