Yttrium sesquioxide, Y 2 O 3 , thin films deposited on Si by ion beam sputtering: microstructure and dielectric properties

Author: Gaboriaud R.J.   Pailloux F.   Guerin P.   Paumier F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.400, Iss.1, 2001-12, pp. : 106-110

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Abstract