In situ detection of F 2 laser-induced oxidation on hydrogen-terminated Si(111) and Si(110) surfaces by Fourier transform infrared transmission spectroscopy

Author： Lambers J.   Hess P.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.400, Iss.1, 2001-12, pp. : 111-115

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