Metal-organic chemical vapor deposition growth of GaN thin film on 3C-SiC/Si(111) substrate using various buffer layers

Author： Park C.I.   Kang J.H.   Kim K.C.   Nahm K.S.   Suh E.-K.   Lim K.Y.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.401, Iss.1, 2001-12, pp. : 60-66

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