Phase composition and microstructure of polycrystalline and epitaxial TaN x layers grown on oxidized Si(001) and MgO(001) by reactive magnetron sputter deposition

Author： Shin C.-S.   Kim Y.-W.   Gall D.   Greene J.E.   Petrov I.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.402, Iss.1, 2002-01, pp. : 172-182

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