An investigation of tin oxide plasma-enhanced chemical vapor deposition using optical emission spectroscopy

Author： Robbins J.J. Alexander R.T. Xiao W. Vincent T.L. Wolden C.A.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.406, Iss.1, 2002-03, pp. : 145-150

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