Effects of mechanical stress on polycrystalline-silicon resistors

Author： Nakabayashi M.   Ohyama H.   Simoen E.   Ikegami M.   Claeys C.   Kobayashi K.   Yoneoka M.   Miyahara K.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.406, Iss.1, 2002-03, pp. : 195-199

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