Low-temperature growth and orientational control in RuO 2 thin films by metal-organic chemical vapor deposition

Author： Bai G.-R. Foster C.M. Wang A. Vetrone J.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.310, Iss.1, 1997-11, pp. : 75-80

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