High concentration erbium doping of silicon-rich SiO 2 thin films on silicon

Author: Xu F.   Xiao Z.   Cheng G.   Yi Z.   Zhang T.   Gu L.   Wang X.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.410, Iss.1, 2002-05, pp. : 94-100

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract