Oxidation behavior of TiN/AlN multilayer films prepared by ion beam-assisted deposition

By Kim D.-G.   Seong T.-Y.   Baik Y.-J.  

Thin Solid Films, Vol. 397, Iss. 1, 2001-10 ,pp. : 203-207

Elsevier

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Ion beam-assisted deposition of DLC films on PMMA and TiN/PMMA

By Li D.J.   Cui F.Z.   Gu H.Q.   Li W.Z.  

Vacuum, Vol. 56, Iss. 3, 2000-03 ,pp. : 205-211

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AlN thin films prepared by ion beam induced chemical vapour deposition

By Sanchez-Lopez J.C.   Contreras L.   Fernandez A.   Gonzalez-Elipe A.R.   Martin J.M.   Vacher B.  

Thin Solid Films, Vol. 317, Iss. 1, 1998-04 ,pp. : 100-104

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Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition

By Dumas L.   Quesnel E.   Robic J.-Y.   Pauleau Y.  

Thin Solid Films, Vol. 382, Iss. 1, 2001-02 ,pp. : 61-68

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Influence of oxygen on the morphological and structural properties of Ti thin films grown by ion beam-assisted deposition

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