Chemical vapor deposition growth and properties of TaC x N y

Author： Engbrecht E.R.   Sun Y.-M.   Smith S.   Pfiefer K.   Bennett J.   White J.M.   Ekerdt J.G.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.418, Iss.2, 2002-10, pp. : 145-150

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