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Author: George V.C. Das A. Roy M. Dua A.K. Raj P. Zahn D.R.T.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.419, Iss.1, 2002-11, pp. : 114-117
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Growth and microhardness of SiC films by plasma-enhanced chemical vapor deposition
By Seo J.-Y. Yoon S.-Y. Niihara K. Kim K.H.
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