Properties of diamond films grown from CH 4 &unknown;CF 4 &unknown;H 2 gas mixture using the hot-filament chemical vapor deposition technique

Author: Musale D.V.   Pavaskar N.R.   Kshirsagar S.T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.422, Iss.1, 2002-12, pp. : 20-27

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Abstract