Electrical properties of stacked gate dielectric (SiO 2 /ZrO 2 ) deposited on strained SiGe layers

Author: Chatterjee S.   Samanta S.K.   Banerjee H.D.   Maiti C.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.422, Iss.1, 2002-12, pp. : 33-38

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Abstract