The effect of target nitridation on structural properties of InN grown by radio-frequency reactive sputtering

Author: Motlan Y.   Goldys E.M.   Tansley T.L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.422, Iss.1, 2002-12, pp. : 28-32

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Abstract