Crystallization behavior of thin ALD-Al 2 O 3 films

Author： Jakschik S.   Schroeder U.   Hecht T.   Gutsche M.   Seidl H.   Bartha J.W.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.425, Iss.1, 2003-02, pp. : 216-220

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