Hafnium silicate formation by ultra-violet/ozone oxidation of hafnium silicide

Author: Punchaipetch P.   Pant G.   Quevedo-Lopez M.   Zhang H.   El-Bouanani M.   Kim M.J.   Wallace R.M.   Gnade B.E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.425, Iss.1, 2003-02, pp. : 68-71

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Abstract