Defects and transport properties of electron-irradiated microcrystalline silicon with successive annealing

Author: Bronner W.   Kleider J.P.   Bruggemann R.   Mehring M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 51-55

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Abstract