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Elsevier

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Real time spectroscopic ellipsometry monitoring of the SiC growth during the interaction process of elemental carbon with Si surfaces

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Studying early time HWCVD growth of a-Si:H by real time spectroscopic ellipsometry

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Kinetic vs. strain-induced growth instabilities on vicinal Si(001) substrates

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Real time analysis of amorphous and microcrystalline silicon film growth by multichannel ellipsometry

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