Author: Swain B.P. Patil S.B. Kumbhar A. Dusane R.O.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 186-188
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Annealing effects on a-SiC:H and a-SiC:H(F) thin films deposited by PECVD at room temperature
Thin Solid Films, Vol. 261, Iss. 1, 1995-06 ,pp. :