Studying early time HWCVD growth of a-Si:H by real time spectroscopic ellipsometry

Author: Levi D.   Nelson B.P.   Reedy R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 20-23

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract