Spectroscopic ellipsometry study of interfaces and crystallization behavior during annealing of a-Si:H films

Author： Losurdo M. Roca F. De Rosa R. Capezzuto P. Bruno G.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 69-72

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