Author: Matsumura H. Umemoto H. Izumi A. Masuda A.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 7-14
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Summary of research in NEDO Cat-CVD project in Japan
By Matsumura H.
Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. :
Status of Cat-CVD (Hot Wire CVD) research in the United States
By Mahan A.H.
Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. :
Status of Cat-CVD (Hot-Wire CVD) research in Europe
Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. :
Surface chemical reactions of diamond (100) by Cat-CVD
By Song X. Wang M. Wang B. Chen G. Yan H.
Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. :
Preparation of poly-Si films by Cat-CVD for thin film transistor
By Sunayama H. Yamada K. Karasawa M. Ishibashi K.
Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. :