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Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. : 61-65

Elsevier

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Hot-wire deposition of photonic-grade amorphous silicon

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High-rate deposition of amorphous silicon films using hot-wire CVD with a coil-shaped filament

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Deposition of large area amorphous silicon films by ECR plasma CVD

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Electronic states and the light-induced metastability in hydrogenated amorphous silicon prepared by hot-wire CVD

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