Nanoscaled composite TiN/Cu multilayer thin films deposited by dual ion beam sputtering: growth and structural characterisation

Author: Abadias G.   Tse Y.Y.   Michel A.   Jaouen C.   Jaouen M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.433, Iss.1, 2003-06, pp. : 166-173

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Abstract